PRODUCT OVERVIEW
Magnetic Annealing Tool Systems: BL & SL Series Overview
FD&S offers two innovative magnetic annealing systems: the **BL (Bottom Loading) Series** and the **SL (Side Loading) Series**. Each series incorporates various magnet types, including Permanent Magnet, ElectroMagnet, and Super-conducting Magnet, to provide optimal solutions tailored to customers' specific magnetization requirements.
- **BL Series (Bottom Loading):** Optimized primarily for Perpendicular Magnetization processes, providing stable wafer handling through bottom loading.
- **SL Series (Side Loading):** Specialized for In-plane Magnetization processes, offering flexible installation and maintenance benefits via side loading.
All systems support 8-inch and 12-inch wafers, ensuring high processing stability and uniformity through optimized technology. (Max furnace temperature: 500°C)
BL vs SL Series Key Comparison
| Category | BL Series (Bottom Loading) | SL Series (Side Loading) |
|---|---|---|
| Main Specialized Process | Perpendicular Magnetization | In-plane Magnetization |
| Wafer Loading Type | Bottom Loading | Side Loading |
| Magnet Type Range | Permanent (1T) & Super conducting (5T) | Super conducting (3T, 5T) Focus |
| Footprint Characteristics | Relatively Small Footprint (Vertical Type) | Relatively Large Footprint (Horizontal Type) |
MVAO Product
